2005 Program
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2005 Participant: Dimitri Hughes

Project Title:
Microelectromechanical System (MEMS) Laboratory Development for Undergraduate Curriculum Integration at the University of Virginia.

Faculty Advisor:
Nathan Swami

 



Dimitri begins by cleaning and adding a primer to a glass wafer, prior to the addition of the electrode layer.



A thin photoresist layer is then added on top of the electrode layer. Spinning of the sample controls thickness of the layer.


Project Summary:

This research project, the MEMS Laboratory Development for Undergraduate Curriculum Integration at the University of Virginia, is focused on creating a laboratory-based module for third and fourth year electrical engineering students at the University of Virginia. Microelectromechanical systems are a new, rising technology in the field of Electrical Engineering with the potential to impact many pre-existing applications. Microelectromechanical Systems, or MEMS, are developed through a micro-fabrication process using what is known as a layer and etch method. This method creates very thin layers of various materials and removes certain components from them to leave a free standing Microelectro-mechanical device. The development of this laboratory-based class is to insure that graduates of the Electrical Engineering department at UVA have an opportunity to gain a fundamental, hands-on understanding of this technology for utilization in engineering practice.




A metal mask is placed over the photoresist layer, prior to exposure of the layer under a microscope.





The photoresist layer is then intentionally-exposed by microscope, in order to leave patterned sections of exposed and unexposed areas.

 
 
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